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Tatsuhiro Sato
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Vancouver, WA, US
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Patents Grants
last 30 patents
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Patent Grant
Quartz glass body having improved resistance against plasma corrosi...
Patent number
6,887,576
Issue date
May 3, 2005
Herseus Quarzglas GmbH & Co. KG
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Patents Applications
last 30 patents
Information
Patent Application
Silica glass jig for semiconductor industry and method for producin...
Publication number
20040050102
Publication date
Mar 18, 2004
Tohru Segawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Glass member resistant to plasma corrosion
Publication number
20030185738
Publication date
Oct 2, 2003
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
Silica glass jig for semiconductor industry and method for producin...
Publication number
20020078886
Publication date
Jun 27, 2002
Tohru Segawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Quartz glass body having improved resistance against plasma corrosi...
Publication number
20020076559
Publication date
Jun 20, 2002
Tatsuhiro Sato
C03 - GLASS MINERAL OR SLAG WOOL