Tatsuhiro TAKAHASHI

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and substrate transfer method
- Patent number 8,202,034
- Issue date Jun 19, 2012
- Canon Anelva Corporation
- Hiroshi Sone
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20110052349
- Publication date Mar 3, 2011
- Canon ANELVA Corporation
- Hiroshi SONE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS