Tatsuhiro Ueki

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Koshi City, Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Processing liquid ejection nozzle, nozzle arm, substrate processing...
- Patent number 11,776,824
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Yoshifumi Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus and rec...
- Patent number 10,403,518
- Issue date Sep 3, 2019
- Tokyo Electron Limited
- Hiromitsu Nanba
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING LIQUID EJECTION NOZZLE, NOZZLE ARM, SUBSTRATE PROCESSING...
- Publication number 20210020463
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Yoshifumi AMANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND REC...
- Publication number 20180269076
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Hiromitsu Nanba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180076057
- Publication date Mar 15, 2018
- TOKYO ELECTRON LIMITED
- Tatsuhiro Ueki
- H01 - BASIC ELECTRIC ELEMENTS