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Hitachinaka, JP
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last 30 patents
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Patent Grant
Scanning electron microscope and sample observation method
Patent number
8,519,334
Issue date
Aug 27, 2013
Hitachi High-Technologies Corporation
Satoshi Tadaka
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
Publication number
20130037716
Publication date
Feb 14, 2013
Hitachi High-Technologies Corporation
Satoshi Tadaka
H01 - BASIC ELECTRIC ELEMENTS