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Tatsumi Kusaba
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for producing a bonded wafer
Patent number
8,003,494
Issue date
Aug 23, 2011
SUMCO Corporation
Hideki Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
P-type silicon wafer and method for heat-treating the same
Patent number
7,939,441
Issue date
May 10, 2011
Sumco Corporation
Tatsumi Kusaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing bonded silicon wafer
Patent number
7,927,957
Issue date
Apr 19, 2011
SUMCO Corporation
Tatsumi Kusaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing bonded wafer
Patent number
7,927,972
Issue date
Apr 19, 2011
Sumco Corporation
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing bonded wafer
Patent number
7,767,549
Issue date
Aug 3, 2010
Sumco Corporation
Hidehiko Okuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for regenerating layer transferred wafer
Patent number
7,763,541
Issue date
Jul 27, 2010
Sumco Corporation
Hidehiko Okuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing bonded wafer
Patent number
7,745,306
Issue date
Jun 29, 2010
Sumco Corporation
Hidehiko Okuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing bonded wafer
Patent number
7,718,509
Issue date
May 18, 2010
Sumco Corporation
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High purification method of jig for semiconductor heat treatment
Patent number
7,601,227
Issue date
Oct 13, 2009
Sumco Corporation
Tatsumi Kusaba
C30 - CRYSTAL GROWTH
Information
Patent Grant
P-type silicon wafer and method for heat-treating the same
Patent number
7,541,663
Issue date
Jun 2, 2009
Sumco Corporation
Tatsumi Kusaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for cleaning silicon substrate
Patent number
7,534,728
Issue date
May 19, 2009
Sumco Corporation
Hideki Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing bonded substrate and bonded substrate manu...
Patent number
7,442,623
Issue date
Oct 28, 2008
Sumco Corporation
Akihiko Endo
B08 - CLEANING
Information
Patent Grant
Method for manufacturing SOI substrate
Patent number
7,416,960
Issue date
Aug 26, 2008
Sumco Corporation
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing SOI substrate
Patent number
7,364,984
Issue date
Apr 29, 2008
Sumco Corporation
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing SOI substrate
Patent number
7,354,844
Issue date
Apr 8, 2008
Sumco Corporation
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for heat-treating silicon wafer and silicon wafer
Patent number
7,311,775
Issue date
Dec 25, 2007
Sumco Corporation
Tatsumi Kusaba
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PRODUCING A BONDED WAFER
Publication number
20100248447
Publication date
Sep 30, 2010
SUMCO CORPORATION
Hideki Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Producing Bonded Wafer
Publication number
20100184270
Publication date
Jul 22, 2010
SUMCO CORPORATION
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PRODUCING BONDED WAFER
Publication number
20100144119
Publication date
Jun 10, 2010
SUMCO CORPORATION
Tatsumi Kusaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING BONDED SILICON WAFER
Publication number
20100068867
Publication date
Mar 18, 2010
SUMCO CORPORATION
Tatsumi Kusaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method For Producing Bonded Wafer
Publication number
20090298261
Publication date
Dec 3, 2009
SUMCO CORPORATION
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing bonded wafer
Publication number
20090258475
Publication date
Oct 15, 2009
SUMCO CORPORATION
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
P-TYPE SILICON WAFER AND METHOD FOR HEAT-TREATING THE SAME
Publication number
20090233420
Publication date
Sep 17, 2009
SUMCO CORPORATION
Tatsumi Kusaba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing bonded wafer
Publication number
20080213974
Publication date
Sep 4, 2008
SUMCO CORPORATION
Hidehiko OKUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for Regenerating Layer Transferred Wafer and Layer Transfer...
Publication number
20080124929
Publication date
May 29, 2008
Hidehiko Okuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for producing bonded wafer
Publication number
20080020514
Publication date
Jan 24, 2008
SUMCO CORPORATION
Hidehiko Okuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing SOI Substrate
Publication number
20080014716
Publication date
Jan 17, 2008
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing SOI Substrate
Publication number
20080014717
Publication date
Jan 17, 2008
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Bonded Substrate and Bonded Substrate Manu...
Publication number
20070117281
Publication date
May 24, 2007
Akihiko Endo
B08 - CLEANING
Information
Patent Application
High purification method of jig for semiconductor heat treatment
Publication number
20070028945
Publication date
Feb 8, 2007
SUMCO CORPORATION
Tatsumi Kusaba
C30 - CRYSTAL GROWTH
Information
Patent Application
Process for cleaning silicon substrate
Publication number
20060234461
Publication date
Oct 19, 2006
SUMCO CORPORATION
Hideki Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing SOI substrate
Publication number
20060177993
Publication date
Aug 10, 2006
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for heat-treating silicon wafer and silicon wafer
Publication number
20060027161
Publication date
Feb 9, 2006
SUMCO CORPORATION
Tatsumi Kusaba
C30 - CRYSTAL GROWTH
Information
Patent Application
P-type silicon wafer and method for heat-treating the same
Publication number
20060027897
Publication date
Feb 9, 2006
SUMCO CORPORATION
Tatsumi Kusaba
H01 - BASIC ELECTRIC ELEMENTS