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Tatsumi Satou
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Surface inspection apparatus, polarization illuminating device and...
Patent number
7,307,725
Issue date
Dec 11, 2007
Nikon Corporation
Takeo Oomori
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Surface inspection apparatus, polarization illuminating device and...
Publication number
20050280806
Publication date
Dec 22, 2005
Nikon Corporation
Takeo Oomori
G01 - MEASURING TESTING