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Tatsunori Kobayashi
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Anpachi, JP
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last 30 patents
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Patent Grant
Wafer-polishing head and polishing apparatus having the same
Patent number
6,508,696
Issue date
Jan 21, 2003
Mitsubishi Materials Corporation
Tatsunori Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing apparatus, polishing method and method of conditioning po...
Patent number
6,488,573
Issue date
Dec 3, 2002
Mitsubishi Materials Corporation
Tatsunori Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer transfer apparatus and wafer polishing apparatus, and method...
Patent number
6,398,906
Issue date
Jun 4, 2002
Mitsubishi Materials Corporation
Tatsunori Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer holding head and wafer polishing apparatus, and method for ma...
Patent number
6,242,353
Issue date
Jun 5, 2001
Mitsubishi Materials Corporation
Tatsunori Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Rotary knife
Patent number
5,099,733
Issue date
Mar 31, 1992
Mitsubishi Materials Corporation
Tatsunori Kobayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Rotary knife assembly
Patent number
5,048,388
Issue date
Sep 17, 1991
Mitsubishi Metal Corporation
Tatsunori Kobayashi
B26 - HAND CUTTING TOOLS CUTTING SEVERING