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Fukushima, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for cleaning silicon wafer
Patent number
11,878,329
Issue date
Jan 23, 2024
Shin-Etsu Handotai Co., Ltd.
Kensaku Igarashi
B08 - CLEANING
Information
Patent Grant
Method for evaluating silicon wafer and method for manufacturing si...
Patent number
11,222,780
Issue date
Jan 11, 2022
Shin-Etsu Handotai Co., Ltd.
Kensaku Igarashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning semiconductor wafer
Patent number
11,177,125
Issue date
Nov 16, 2021
Shin-Etsu Handotai Co., Ltd.
Kensaku Igarashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning semiconductor wafer
Patent number
11,094,525
Issue date
Aug 17, 2021
Shin-Etsu Handotai Co., Ltd.
Kensaku Igarashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for cleaning semiconductor wafer
Patent number
9,082,610
Issue date
Jul 14, 2015
Shin-Etsu Handotai Co., Ltd.
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Water and method for storing silicon wafer
Patent number
8,303,722
Issue date
Nov 6, 2012
Shin-Etsu Handotai Co., Ltd.
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultrasonic cleaning apparatus and ultrasonic cleaning method
Patent number
8,083,856
Issue date
Dec 27, 2011
Shin-Etsu Handotai Co., Ltd.
Tatsuo Abe
B08 - CLEANING
Information
Patent Grant
Substrate processing method and processing apparatus
Patent number
6,374,834
Issue date
Apr 23, 2002
Shin-Etsu Handotai Co., Ltd.
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for etching wafer
Patent number
5,914,281
Issue date
Jun 22, 1999
Shin-Etsu Handotai Co., Ltd.
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PRODUCING HETEROEPITAXIAL WAFER
Publication number
20240429046
Publication date
Dec 26, 2024
Shin-Etsu Handotai Co., Ltd.
Toshiki MATSUBARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EPITAXIAL WAFER AND PRODUCTION METHOD THEREFOR
Publication number
20240395563
Publication date
Nov 28, 2024
Shin-Etsu Handotai Co., Ltd.
Atsushi SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE AN...
Publication number
20240274477
Publication date
Aug 15, 2024
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi OHTSUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON WAFER MANUFACTURING METHOD
Publication number
20240203745
Publication date
Jun 20, 2024
Shin-Etsu Handotai Co., Ltd.
Tatsuo ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CLEANING SILICON WAFER, METHOD OF MANUFACTURING SILICON W...
Publication number
20240120192
Publication date
Apr 11, 2024
Shin-Etsu Handotai Co., Ltd.
Kota FUJII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE
Publication number
20230268175
Publication date
Aug 24, 2023
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi OHTSUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DRY-ETCHING SEMICONDUCTOR SUBSTRATE AND METHOD FOR DRY-E...
Publication number
20230207399
Publication date
Jun 29, 2023
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi OHTSUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE
Publication number
20230170208
Publication date
Jun 1, 2023
Shin-Etsu Handotai Co., Ltd.
Tsuyoshi OHTSUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR POLISHING WAFER
Publication number
20230137813
Publication date
May 4, 2023
Shin-Etsu Handotai Co., Ltd.
Masaaki OSEKI
B24 - GRINDING POLISHING
Information
Patent Application
WAFER TREATMENT APPARATUS AND METHOD FOR TREATING WAFER
Publication number
20210013031
Publication date
Jan 14, 2021
Shin-Etsu Handotai Co., Ltd.
Kensaku IGARASHI
B08 - CLEANING
Information
Patent Application
METHOD FOR EVALUATING SILICON WAFER AND METHOD FOR MANUFACTURING SI...
Publication number
20200203233
Publication date
Jun 25, 2020
Shin-Etsu Handotai Co., Ltd.
Kensaku IGARASHI
B08 - CLEANING
Information
Patent Application
METHOD FOR CLEANING SILICON WAFER
Publication number
20200164410
Publication date
May 28, 2020
Shin-Etsu Handotai Co., Ltd.
Kensaku IGARASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER
Publication number
20200105517
Publication date
Apr 2, 2020
Shin-Etsu Handotai Co., Ltd.
Kensaku IGARASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER
Publication number
20200027721
Publication date
Jan 23, 2020
Shin-Etsu Handotai Co., Ltd.
Kensaku IGARASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRASONIC CLEANING APPARATUS AND METHOD FOR CLEANING
Publication number
20160067749
Publication date
Mar 10, 2016
Shin-Etsu Handotai Co., Ltd.
Hitoshi KABASAWA
B08 - CLEANING
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER
Publication number
20150053234
Publication date
Feb 26, 2015
Shin-Etsu Handotai Co., Ltd.
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER
Publication number
20140048100
Publication date
Feb 20, 2014
Shin-Etsu Handotai Co., Ltd.
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER
Publication number
20130233344
Publication date
Sep 12, 2013
Shin-Etsu Handotai Co., Ltd.
Hitoshi Kabasawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRASONIC CLEANING APPARATUS AND ULTRASONIC CLEANING METHOD
Publication number
20100294305
Publication date
Nov 25, 2010
SHIN-ETSU HANDOTAI CO., LTD
Tatsuo Abe
B08 - CLEANING
Information
Patent Application
Water and method for storing silicon wafer
Publication number
20030139067
Publication date
Jul 24, 2003
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Water for storing silicon wafers and storing method
Publication number
20030036570
Publication date
Feb 20, 2003
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS