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Tatsuo Asamaki
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Tokyo, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus
Patent number
4,950,956
Issue date
Aug 21, 1990
Anelva Corporation
Tatsuo Asamaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing an object by gas plasma with a reduced damage
Patent number
4,919,783
Issue date
Apr 24, 1990
Anelva Corporation
Tatsuo Asamaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam generating apparatus
Patent number
4,638,209
Issue date
Jan 20, 1987
Anelva Corporation
Tatsuo Asamaki
H01 - BASIC ELECTRIC ELEMENTS