Tatsuo Enami

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Chamber replacing method
- Patent number 8,813,329
- Issue date Aug 26, 2014
- Gigaphoton Inc.
- Junichi Fujimoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Chamber replacing method
- Patent number 7,984,539
- Issue date Jul 26, 2011
- Gigaphoton Inc.
- Junichi Fujimoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Wavelength detecting apparatus, laser apparatus, and wavelength det...
- Patent number 7,196,796
- Issue date Mar 27, 2007
- Gigaphoton, Inc.
- Masato Moriya
- G01 - MEASURING TESTING
Information Patent Grant
Arf excimer laser device, scanning type exposure device and ultravi...
- Patent number 6,819,699
- Issue date Nov 16, 2004
- Komatsu Ltd.
- Tatsuo Enami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum ultraviolet laser wavelength measuring apparatus
- Patent number 6,636,297
- Issue date Oct 21, 2003
- Gigaphoton, Inc.
- Osamu Wakabayashi
- G01 - MEASURING TESTING
Information Patent Grant
Once through fan for excimer laser apparatus
- Patent number 6,337,872
- Issue date Jan 8, 2002
- Komatsu Ltd.
- Hisashi Nara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wavelength detector
- Patent number 6,243,163
- Issue date Jun 5, 2001
- Komatsu Ltd.
- Osamu Wakabayashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LASER APPARATUS
- Publication number 20140328364
- Publication date Nov 6, 2014
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER REPLACING METHOD
- Publication number 20110232058
- Publication date Sep 29, 2011
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chamber replacing method
- Publication number 20080115342
- Publication date May 22, 2008
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wavelength detecting apparatus, laser apparatus, and wavelength det...
- Publication number 20030137672
- Publication date Jul 24, 2003
- Masato Moriya
- G01 - MEASURING TESTING
Information Patent Application
Vacuum ultraviolet laser wavelength measuring apparatus
- Publication number 20020159064
- Publication date Oct 31, 2002
- Komatsu Ltd.
- Osamu Wakabayashi
- G01 - MEASURING TESTING