Tatsuo Fukui

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Detection method and detection apparatus
- Patent number 8,994,957
- Issue date Mar 31, 2015
- Nikon Corporation
- Yoshiaki Kito
- G01 - MEASURING TESTING
Information Patent Grant
Projection optical system, exposure apparatus, exposure method, dis...
- Patent number 8,867,019
- Issue date Oct 21, 2014
- Nikon Corporation
- Masato Kumazawa
- G02 - OPTICS
Information Patent Grant
Detection method and detection apparatus
- Patent number 8,547,559
- Issue date Oct 1, 2013
- Nikon Corporation
- Yoshiaki Kito
- G01 - MEASURING TESTING
Information Patent Grant
Illumination apparatus for efficiently gathering illumination light
- Patent number 8,520,188
- Issue date Aug 27, 2013
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, exposure apparatus, exposure method, dis...
- Patent number 8,305,556
- Issue date Nov 6, 2012
- Nikon Corporation
- Masato Kumazawa
- G02 - OPTICS
Information Patent Grant
Focal point detection apparatus
- Patent number 7,580,121
- Issue date Aug 25, 2009
- Nikon Corporation
- Tatsuo Fukui
- G02 - OPTICS
Information Patent Grant
Method of adjusting optical imaging system, positional deviation de...
- Patent number 7,528,954
- Issue date May 5, 2009
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark position detection apparatus
- Patent number 7,456,967
- Issue date Nov 25, 2008
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark position detecting apparatus and mark position detecting method
- Patent number 7,197,176
- Issue date Mar 27, 2007
- Nikon Corporation
- Tatsuo Fukui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
mark position detecting apparatus
- Patent number 6,975,399
- Issue date Dec 13, 2005
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for detecting optical positional deviation
- Patent number 6,885,450
- Issue date Apr 26, 2005
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus and method
- Patent number 6,668,075
- Issue date Dec 23, 2003
- Nikon Corporation
- Ayako Nakamura
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
DETECTION METHOD AND DETECTION APPARATUS
- Publication number 20140022560
- Publication date Jan 23, 2014
- Nikon Corporation
- Yoshiaki KITO
- G01 - MEASURING TESTING
Information Patent Application
DETECTION METHOD AND DETECTION APPARATUS
- Publication number 20130033712
- Publication date Feb 7, 2013
- Yoshiaki Kito
- G01 - MEASURING TESTING
Information Patent Application
Projection Optical System, Exposure Apparatus, Exposure Method, Dis...
- Publication number 20130021589
- Publication date Jan 24, 2013
- Nikon Corporation
- Masato KUMAZAWA
- G02 - OPTICS
Information Patent Application
Illumination apparatus for efficiently gathering illumination light
- Publication number 20100283983
- Publication date Nov 11, 2010
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, EXPOSURE METHOD, DIS...
- Publication number 20090021712
- Publication date Jan 22, 2009
- Nikon Corporation
- Masato KUMAZAWA
- G02 - OPTICS
Information Patent Application
Focal Point Detection Device
- Publication number 20070258084
- Publication date Nov 8, 2007
- Tatsuo Fukui
- G02 - OPTICS
Information Patent Application
Method of adjusting optical imaging system, positional deviation de...
- Publication number 20070064233
- Publication date Mar 22, 2007
- NIKON CORPORATION
- Makoto Takagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mark position detection apparatus
- Publication number 20070002323
- Publication date Jan 4, 2007
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mark position detecting apparatus
- Publication number 20060082775
- Publication date Apr 20, 2006
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mark position detection apparatus
- Publication number 20040227944
- Publication date Nov 18, 2004
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mark position detecting apparatus and mark position detecting method
- Publication number 20040114792
- Publication date Jun 17, 2004
- Nikon Corporation
- Tatsuo Fukui
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Mark position detecting apparatus
- Publication number 20040036879
- Publication date Feb 26, 2004
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical positional displacement measuring apparatus and adjustment...
- Publication number 20020060793
- Publication date May 23, 2002
- Nikon Corporation
- Tatsuo Fukui
- G02 - OPTICS
Information Patent Application
Apparatus for detecting optical positional deviation
- Publication number 20020003626
- Publication date Jan 10, 2002
- Nikon Corporation
- Tatsuo Fukui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tatsuo Fukui

Person

Patents Grantslast 30 patents

Detection method and detection apparatus

Projection optical system, exposure apparatus, exposure method, dis...

Detection method and detection apparatus

Illumination apparatus for efficiently gathering illumination light

Projection optical system, exposure apparatus, exposure method, dis...

Focal point detection apparatus

Method of adjusting optical imaging system, positional deviation de...

Mark position detection apparatus

Mark position detecting apparatus and mark position detecting method

mark position detecting apparatus

Apparatus for detecting optical positional deviation

Position detection apparatus and method

Patents Applicationslast 30 patents

DETECTION METHOD AND DETECTION APPARATUS

DETECTION METHOD AND DETECTION APPARATUS

Projection Optical System, Exposure Apparatus, Exposure Method, Dis...

Illumination apparatus for efficiently gathering illumination light

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, EXPOSURE METHOD, DIS...

Focal Point Detection Device

Method of adjusting optical imaging system, positional deviation de...

Mark position detection apparatus

Mark position detecting apparatus

Mark position detection apparatus

Mark position detecting apparatus and mark position detecting method

Mark position detecting apparatus

Optical positional displacement measuring apparatus and adjustment...

Apparatus for detecting optical positional deviation