Tatsuo Hatano

Person

Yamanashi-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus and substrate processing system
- Patent number 12,033,878
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transport apparatus, substrate transport method, and subs...
- Patent number 11,990,357
- Issue date May 21, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus and substrate processing system
- Patent number 11,764,092
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Tatsuo Hatano
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum transfer device and substrate processing system
- Patent number 11,602,856
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Tatsuo Hatano
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Film-forming device
- Patent number 11,410,837
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Hiroyuki Toshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering method and sputtering apparatus
- Patent number 11,404,255
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazunaga Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage device and processing apparatus
- Patent number 11,251,027
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Tatsuo Hatano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming later insulating films for MTJ
- Patent number 10,910,215
- Issue date Feb 2, 2021
- Tokyo Electron Limited
- Naoki Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting table system, substrate processing apparatus, and temperat...
- Patent number 10,325,801
- Issue date Jun 18, 2019
- Tokyo Electron Limited
- Tadashi Mitsunaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming copper film
- Patent number 10,189,230
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Hiroyuki Toshima
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and processing apparatus for performing pre-treatment to for...
- Patent number 10,068,798
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Hiroyuki Toshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method using reversible decomposition reaction
- Patent number 9,976,217
- Issue date May 22, 2018
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 9,576,850
- Issue date Feb 21, 2017
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of supplying cobalt to recess
- Patent number 9,362,167
- Issue date Jun 7, 2016
- Tokyo Electron Limited
- Atsushi Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering method and sputtering apparatus
- Patent number 9,121,094
- Issue date Sep 1, 2015
- Tokyo Electron Limited
- Kaoru Maekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for film formation, apparatus for film formation, and comput...
- Patent number 9,062,374
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming Cu wiring
- Patent number 9,064,690
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 8,999,841
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure, film forming apparatus and raw material r...
- Patent number 8,992,686
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming copper wiring and method and system for forming c...
- Patent number 8,859,422
- Issue date Oct 14, 2014
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material recovery method and trapping mechanism for recovering...
- Patent number 8,408,025
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming copper wiring and copper film, and film forming...
- Patent number 8,399,353
- Issue date Mar 19, 2013
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal recovery method, metal recovery apparatus, gas exhaust system...
- Patent number 8,349,283
- Issue date Jan 8, 2013
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 8,277,889
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for film formation, apparatus for film formation, and comput...
- Patent number 8,273,409
- Issue date Sep 25, 2012
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method, semiconductor device man...
- Patent number 8,133,811
- Issue date Mar 13, 2012
- Tokyo Electrcn Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus and storage medium
- Patent number 8,129,271
- Issue date Mar 6, 2012
- Tokyo Electron Limited
- Yasuhiko Kojima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and film deposition apparatus of metal film
- Patent number 8,029,873
- Issue date Oct 4, 2011
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, plasma film forming apparatus and storage medium
- Patent number 8,026,176
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Takashi Sakuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CV method using metal carbonyl gas
- Patent number 7,879,399
- Issue date Feb 1, 2011
- Tokyo Electron Limited
- Tatsuo Hatano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20230377927
- Publication date Nov 23, 2023
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230183854
- Publication date Jun 15, 2023
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20230097539
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220415688
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220415687
- Publication date Dec 29, 2022
- Tokyo Electron Limited
- Tatsuo HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD, AND METHOD OF M...
- Publication number 20220259727
- Publication date Aug 18, 2022
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND SUBSTR...
- Publication number 20220223447
- Publication date Jul 14, 2022
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND SUBSTR...
- Publication number 20220130701
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM TRANSFER DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE...
- Publication number 20220037181
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220016786
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SPUTTERING METHOD AND SPUTTERING APPARATUS
- Publication number 20210082675
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Kazunaga ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING APPARATUS, HEATING METHOD, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200411340
- Publication date Dec 31, 2020
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
- Publication number 20200373133
- Publication date Nov 26, 2020
- TOKYO ELECTRON LIMITED
- Tatsuo HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING DEVICE
- Publication number 20200071815
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Hiroyuki TOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Insulating Film
- Publication number 20180012756
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING COPPER FILM
- Publication number 20180001597
- Publication date Jan 4, 2018
- Hiroyuki TOSHIMA
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD AND PROCESSING APPARATUS FOR PERFORMING PRE-TREATMENT TO FOR...
- Publication number 20170372951
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Hiroyuki TOSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND TEMPERAT...
- Publication number 20170330787
- Publication date Nov 16, 2017
- TOKYO ELECTRON LIMITED
- Tadashi MITSUNAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Supplying Cobalt to Recess
- Publication number 20150243556
- Publication date Aug 27, 2015
- TOKYO ELECTRON LIMITED
- Atsushi SHIMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLACING TABLE STRUCTURE
- Publication number 20150044368
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20140377947
- Publication date Dec 25, 2014
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEVICE
- Publication number 20140346037
- Publication date Nov 27, 2014
- Shigeru MIZUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...
- Publication number 20140287163
- Publication date Sep 25, 2014
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, SE...
- Publication number 20140103529
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING CU WIRING
- Publication number 20140045329
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING COPPER WIRING
- Publication number 20140030886
- Publication date Jan 30, 2014
- TOKYO ELECTRON LIMITED
- Takara FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING METHOD
- Publication number 20130252417
- Publication date Sep 26, 2013
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20130237053
- Publication date Sep 12, 2013
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20130203250
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING APPARATUS AND METHOD
- Publication number 20130081938
- Publication date Apr 4, 2013
- Shigeru MIZUNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tatsuo Hatano

Person

Patents Grantslast 30 patents

Substrate transfer apparatus and substrate processing system

Substrate transport apparatus, substrate transport method, and subs...

Substrate transfer apparatus and substrate processing system

Vacuum transfer device and substrate processing system

Film-forming device

Sputtering method and sputtering apparatus

Stage device and processing apparatus

Method of forming later insulating films for MTJ

Mounting table system, substrate processing apparatus, and temperat...

Method for forming copper film

Method and processing apparatus for performing pre-treatment to for...

Film forming method using reversible decomposition reaction

Method for manufacturing semiconductor device

Method of supplying cobalt to recess

Sputtering method and sputtering apparatus

Method for film formation, apparatus for film formation, and comput...

Method for forming Cu wiring

Semiconductor device manufacturing method

Mounting table structure, film forming apparatus and raw material r...

Method of forming copper wiring and method and system for forming c...

Raw material recovery method and trapping mechanism for recovering...

Methods of forming copper wiring and copper film, and film forming...

Metal recovery method, metal recovery apparatus, gas exhaust system...

Film formation method and film formation apparatus

Method for film formation, apparatus for film formation, and comput...

Semiconductor device manufacturing method, semiconductor device man...

Film forming method, film forming apparatus and storage medium

Film deposition method and film deposition apparatus of metal film

Film forming method, plasma film forming apparatus and storage medium

CV method using metal carbonyl gas

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM FORMING APPARATUS AND FILM FORMING METHOD

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE HEATING DEVICE, SUBSTRATE HEATING METHOD, AND METHOD OF M...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND SUBSTR...

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND SUBSTR...

VACUUM TRANSFER DEVICE, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE...

VACUUM TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM

SPUTTERING METHOD AND SPUTTERING APPARATUS

HEATING APPARATUS, HEATING METHOD, AND SUBSTRATE PROCESSING APPARATUS

STAGE DEVICE AND PROCESSING APPARATUS

FILM-FORMING DEVICE

Method of Forming Insulating Film

METHOD FOR FORMING COPPER FILM

METHOD AND PROCESSING APPARATUS FOR PERFORMING PRE-TREATMENT TO FOR...

MOUNTING TABLE SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND TEMPERAT...

Method of Supplying Cobalt to Recess

PLACING TABLE STRUCTURE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SPUTTER DEVICE

METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SEMICONDUCTOR DEVICE, SE...

METHOD FOR FORMING CU WIRING

METHOD FOR FORMING COPPER WIRING

THIN FILM FORMING METHOD

FILM FORMING METHOD AND FILM FORMING APPARATUS

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

MAGNETRON SPUTTERING APPARATUS AND METHOD