Tatsuo Itagaki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of and apparatus for sputtering, and integrated circuit device
- Patent number 5,175,608
- Issue date Dec 29, 1992
- Hitachi, Ltd.
- Masayasu Nihei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor integrated circuit device and process for producing t...
- Patent number 5,061,985
- Issue date Oct 29, 1991
- Hitachi, Ltd.
- Hideo Meguro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 5,051,812
- Issue date Sep 24, 1991
- Hitachi, Ltd.
- Jin Onuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 5,019,891
- Issue date May 28, 1991
- Hitachi, Ltd.
- Jin Onuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for sputtering
- Patent number 4,999,096
- Issue date Mar 12, 1991
- Hitachi, Ltd.
- Masayasu Nihei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...