Tatsuo Kawashima

Person

  • Nirasaki-Shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Inspection apparatus

    • Patent number 11,467,099
    • Issue date Oct 11, 2022
    • Tokyo Electron Limited
    • Kazumi Yamagata
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Probe card holding device and inspection device

    • Patent number 11,385,260
    • Issue date Jul 12, 2022
    • Tokyo Electron Limited
    • Kazumi Yamagata
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Substrate inspection apparatus

    • Patent number 10,962,565
    • Issue date Mar 30, 2021
    • Tokyo Electron Limited
    • Michio Murata
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Probe system

    • Patent number 6,762,616
    • Issue date Jul 13, 2004
    • Tokyo Electron Limited
    • Koji Kawaguchi
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    PROBE CARD HOLDING DEVICE AND INSPECTION DEVICE

    • Publication number 20210255217
    • Publication date Aug 19, 2021
    • TOKYO ELECTRON LIMITED
    • Kazumi YAMAGATA
    • G01 - MEASURING TESTING
  • Information Patent Application

    INSPECTION APPARATUS

    • Publication number 20200309717
    • Publication date Oct 1, 2020
    • TOKYO ELECTRON LIMITED
    • Kazumi YAMAGATA
    • G01 - MEASURING TESTING
  • Information Patent Application

    SUBSTRATE INSPECTION APPARATUS

    • Publication number 20190107557
    • Publication date Apr 11, 2019
    • Tokyo Electron Limited
    • Michio MURATA
    • G01 - MEASURING TESTING
  • Information Patent Application

    Probe system

    • Publication number 20030112002
    • Publication date Jun 19, 2003
    • Koji Kawaguchi
    • G01 - MEASURING TESTING