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Tatsuo Kawashima
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Nirasaki-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection apparatus
Patent number
11,467,099
Issue date
Oct 11, 2022
Tokyo Electron Limited
Kazumi Yamagata
G01 - MEASURING TESTING
Information
Patent Grant
Probe card holding device and inspection device
Patent number
11,385,260
Issue date
Jul 12, 2022
Tokyo Electron Limited
Kazumi Yamagata
G01 - MEASURING TESTING
Information
Patent Grant
Substrate inspection apparatus
Patent number
10,962,565
Issue date
Mar 30, 2021
Tokyo Electron Limited
Michio Murata
G01 - MEASURING TESTING
Information
Patent Grant
Probe system
Patent number
6,762,616
Issue date
Jul 13, 2004
Tokyo Electron Limited
Koji Kawaguchi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PROBE CARD HOLDING DEVICE AND INSPECTION DEVICE
Publication number
20210255217
Publication date
Aug 19, 2021
TOKYO ELECTRON LIMITED
Kazumi YAMAGATA
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS
Publication number
20200309717
Publication date
Oct 1, 2020
TOKYO ELECTRON LIMITED
Kazumi YAMAGATA
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE INSPECTION APPARATUS
Publication number
20190107557
Publication date
Apr 11, 2019
Tokyo Electron Limited
Michio MURATA
G01 - MEASURING TESTING
Information
Patent Application
Probe system
Publication number
20030112002
Publication date
Jun 19, 2003
Koji Kawaguchi
G01 - MEASURING TESTING