Tatsuo KUSUMOTO

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Nagasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Susceptor, vapor deposition apparatus, vapor deposition method and...
- Patent number 10,490,437
- Issue date Nov 26, 2019
- Sumco Corporation
- Daisuke Hieda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUSCEPTOR, VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD AND...
- Publication number 20160300753
- Publication date Oct 13, 2016
- SUMCO CORPORATION
- Daisuke HIEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...