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Tatsuo Nakato
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Vancouver, WA, US
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last 30 patents
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Patent Grant
Silylated photo-resist layer and planarizing method
Patent number
5,756,256
Issue date
May 26, 1998
Sharp Microelectronics Technology, Inc.
Tatsuo Nakato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming a pattern of silylated planarizing photoresist
Patent number
5,545,512
Issue date
Aug 13, 1996
Sharp Microelectronics Technology, Inc.
Tatsuo Nakato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Silylated photoresist layer and planarizing method
Patent number
5,486,424
Issue date
Jan 23, 1996
Sharp Kabushiki Kaisha
Tatsuo Nakato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY