Tatsuo Shoji

Person

Nagoya, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma generator, plasma control method and method of producing sub...
- Patent number 8,444,806
- Issue date May 21, 2013
- Japan Science and Technology Agency
- Shoji Miyake
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma generator, plasma control method, and method of producing su...
- Patent number 7,785,441
- Issue date Aug 31, 2010
- Japan Science and Technology Agency
- Shoji Miyake
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High frequency power supply device and plasma generator
- Patent number 7,567,037
- Issue date Jul 28, 2009
- Japan Science and Technology Agency
- Yuichi Setsuhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma generator
- Patent number 7,098,599
- Issue date Aug 29, 2006
- Japan Science and Technology Corporation
- Shoji Miyake
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High density plasma deposition and etching apparatus
- Patent number 5,122,251
- Issue date Jun 16, 1992
- Plasma & Materials Technologies, Inc.
- Gregor A. Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density plasma deposition and etching apparatus
- Patent number 5,091,049
- Issue date Feb 25, 1992
- Plasma & Materials Technologies, Inc.
- Gregor Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density plasma deposition and etching apparatus
- Patent number 4,990,229
- Issue date Feb 5, 1991
- Plasma & Materials Technologies, Inc.
- Gregor Campbell
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA GENERATOR, PLASMA CONTROL METHOD AND METHOD OF PRODUCING SUB...
- Publication number 20100304046
- Publication date Dec 2, 2010
- Japan Science and Technology Agency
- Shoji Miyake
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ION GENERATING DEVICE AND NEUTRON GENERATING APPARATUS
- Publication number 20100232559
- Publication date Sep 16, 2010
- Mitsubishi Heavy Industries, Ltd.
- Masayuki Takeishi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
High frequency power supply device and plasma generator
- Publication number 20060057854
- Publication date Mar 16, 2006
- Yuichi Setsuhara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma generation device, plasma control method, and substrate manu...
- Publication number 20060049138
- Publication date Mar 9, 2006
- Japan Science and Technology Agency
- Shoji Miyake
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma generator
- Publication number 20040027293
- Publication date Feb 12, 2004
- Shoji Miyake
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Tatsuo Shoji

Person

Patents Grantslast 30 patents

Plasma generator, plasma control method and method of producing sub...

Plasma generator, plasma control method, and method of producing su...

High frequency power supply device and plasma generator

Plasma generator

High density plasma deposition and etching apparatus

High density plasma deposition and etching apparatus

High density plasma deposition and etching apparatus

Patents Applicationslast 30 patents

PLASMA GENERATOR, PLASMA CONTROL METHOD AND METHOD OF PRODUCING SUB...

ION GENERATING DEVICE AND NEUTRON GENERATING APPARATUS

High frequency power supply device and plasma generator

Plasma generation device, plasma control method, and substrate manu...

Plasma generator