Tatsuro Nagahara

Person

Kakegawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor aqueous composition and use of the same
- Patent number 12,077,727
- Issue date Sep 3, 2024
- Merck Patent GmbH
- Kazuma Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate cleaning solution, and using the same, method for manufac...
- Patent number 12,068,150
- Issue date Aug 20, 2024
- Merck Patent GmbH
- Takafumi Kinuta
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing method
- Patent number 11,901,173
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate pattern filling composition and use of the same
- Patent number 11,859,152
- Issue date Jan 2, 2024
- Merck Patent GmbH
- Yuko Horiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gap filling composition and pattern forming method using compositio...
- Patent number 11,392,035
- Issue date Jul 19, 2022
- Merck Patent GmbH
- Xiaowei Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,260,431
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,211,241
- Issue date Dec 28, 2021
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gap filling composition and pattern forming method using low molecu...
- Patent number 11,169,443
- Issue date Nov 9, 2021
- Merck Patent GmbH
- Xiaowei Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography composition, a method for forming resist patterns and a...
- Patent number 11,156,920
- Issue date Oct 26, 2021
- Merck Patent GmbH
- Kazuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,792,712
- Issue date Oct 6, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Reverse pattern formation composition, reverse pattern formation me...
- Patent number 10,670,969
- Issue date Jun 2, 2020
- AZ Electronic Materials (Luxembourg) S.a.r.l.
- Xiaowei Wang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Inorganic polysilazane resin
- Patent number 10,494,261
- Issue date Dec 3, 2019
- Ridgefield Acquisition
- Takashi Fujiwara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rinse composition, a method for forming resist patterns and a metho...
- Patent number 10,451,974
- Issue date Oct 22, 2019
- AZ Electronic Materials (Luxembourg) S.A.R.L.
- Kazuma Yamamoto
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Composition for resist patterning and method for forming pattern us...
- Patent number 10,191,380
- Issue date Jan 29, 2019
- AZ Electronic Materials (Luxembourg) S.A.R.L.
- Kazuma Yamamoto
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for forming of siliceous film and siliceous film formed usin...
- Patent number 10,000,386
- Issue date Jun 19, 2018
- AZ Electronic Materials (Luxembourg) S.A.R.L.
- Masanobu Hayashi
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Fine resist pattern-forming composition and pattern forming method...
- Patent number 9,921,481
- Issue date Mar 20, 2018
- AZ Electronic Materials (Luxembourg) S.à r.l.
- Kazuma Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Composition for forming fine resist pattern, and pattern formation...
- Patent number 9,411,232
- Issue date Aug 9, 2016
- AZ Electronic Materials (Luxembourg) S.A.R.L.
- Tatsuro Nagahara
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method for forming insulating film
- Patent number 9,165,818
- Issue date Oct 20, 2015
- Merck Patent GmbH
- Yusuke Takano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon oxynitride film formation method and substrate equipped wit...
- Patent number 9,029,071
- Issue date May 12, 2015
- Merck Patent GmbH
- Ninad Shinde
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for forming isolation structure
- Patent number 8,969,172
- Issue date Mar 3, 2015
- AZ Electronic Materials USA Corp.
- Naoko Nakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for formation of siliceous film and siliceous film formed by...
- Patent number 8,889,229
- Issue date Nov 18, 2014
- AA Electronics Materials USA Corp.
- Tatsuro Nagahara
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Photosensitive polysilazane composition, method of forming pattern...
- Patent number 6,902,875
- Issue date Jun 7, 2005
- Clariant Finance (BVI) Limited
- Tatsuro Nagahara
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REMOVING UPPER PART OF SACRIFICIAL LAYER, AND SACRIFICIA...
- Publication number 20250014899
- Publication date Jan 9, 2025
- Merck Patent GmbH
- Takashi SEKITO
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SUBSTRATE SURFACE TREATING SOLUTION, AND USING THE SAME, METHOD FOR...
- Publication number 20240174951
- Publication date May 30, 2024
- Merck Patent GmbH
- Takafumi KINUTA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE TREATING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...
- Publication number 20240166947
- Publication date May 23, 2024
- Merck Patent GmbH
- Takashi SEKITO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR MANUFACTURING THICKENED RESIST PATTERN, THICKENING SOLUT...
- Publication number 20240036469
- Publication date Feb 1, 2024
- Merck Patent GmbH
- Tatsuro NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...
- Publication number 20230235254
- Publication date Jul 27, 2023
- Merck Patent GmbH
- Takafumi KINUTA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
REPLACEMENT LIQUID OF LIQUID FILLING BETWEEN RESIST PATTERNS, AND M...
- Publication number 20230045307
- Publication date Feb 9, 2023
- Merch Patent GmbH
- Kazuma YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220076941
- Publication date Mar 10, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...
- Publication number 20220059344
- Publication date Feb 24, 2022
- Merck Patent GmbH
- Takafumi KINUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING SOLUTION AND METHOD FOR MANUFACTURING DEVICE
- Publication number 20220056383
- Publication date Feb 24, 2022
- Merck Patent GmbH
- Takafumi KINUTA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SEMICONDUCTOR AQUEOUS COMPOSITION AND USE OF THE SAME
- Publication number 20210403829
- Publication date Dec 30, 2021
- Merck Patent GmbH
- Kazuma YAMAMOTO
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200384510
- Publication date Dec 10, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
GAP FILLING COMPOSITION AND PATTERN FORMING METHOD USING COMPOSITIO...
- Publication number 20200319556
- Publication date Oct 8, 2020
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.a.r.l.
- Xiaowei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A LITHOGRAPHY COMPOSITION, A METHOD FOR FORMING RESIST PATTERNS AND...
- Publication number 20190377263
- Publication date Dec 12, 2019
- RIDGEFIELD ACQUISITION
- Kazuma YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190371599
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190366394
- Publication date Dec 5, 2019
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
A RINSE COMPOSITION, A METHOD FOR FORMING RESIST PATTERNS AND A MET...
- Publication number 20190250515
- Publication date Aug 15, 2019
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.a.r.l.
- Kazuma YAMAMOTO
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
REVERSE PATTERN FORMATION COMPOSITION, REVERSE PATTERN FORMATION ME...
- Publication number 20190204747
- Publication date Jul 4, 2019
- Merck Patent GmbH
- Xiaowei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAP FILLING COMPOSITION AND PATTERN FORMING METHOD USING LOW MOLECU...
- Publication number 20190113848
- Publication date Apr 18, 2019
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.a.r.l.
- Xiaowei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE TREATMENT COMPOSITION AND SURFACE TREATMENT METHOD OF RESIS...
- Publication number 20190041757
- Publication date Feb 7, 2019
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.a.r.l.
- Xiaowei WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INORGANIC POLYSILAZANE RESIN
- Publication number 20170240423
- Publication date Aug 24, 2017
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.À R.L.
- Takashi Fujiwara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION FOR RESIST PATTERNING AND METHOD FOR FORMING PATTERN US...
- Publication number 20170219927
- Publication date Aug 3, 2017
- AZ ELECTRIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Kazuma YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR FORMING FINE RESIST PATTERN, AND PATTERN FORMATION...
- Publication number 20160011508
- Publication date Jan 14, 2016
- Tatsuro NAGAHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FINE RESIST PATTERN-FORMING COMPOSITION AND PATTERN FORMING METHOD...
- Publication number 20160002494
- Publication date Jan 7, 2016
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Kazuma YAMAMOTO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR FORMING OF SILICEOUS FILM AND SILICEOUS FILM FORMED USIN...
- Publication number 20150298980
- Publication date Oct 22, 2015
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Masanobu HAYASHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
INORGANIC POLYSILAZANE RESIN
- Publication number 20150004421
- Publication date Jan 1, 2015
- AZ Electronic Materials USA Corp.
- Takashi Fujiwara
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SILICON OXYNITRIDE FILM FORMATION METHOD AND SUBSTRATE EQUIPPED WIT...
- Publication number 20140127630
- Publication date May 8, 2014
- AZ Electronic Materials USA Corp.
- Ninad Shinde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING INSULATING FILM
- Publication number 20130323904
- Publication date Dec 5, 2013
- AZ Electronic Materials USA Corp.
- Yusuke Takano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING SILICON DIOXIDE FILM
- Publication number 20130316515
- Publication date Nov 28, 2013
- AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.
- Tatsuro Nagahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING ISOLATION STRUCTURE
- Publication number 20130214383
- Publication date Aug 22, 2013
- AZ Electronic Materials USA Corp.
- Naoko Nakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon Oxynitride Film Formation Method and Substrate Equipped wit...
- Publication number 20130164690
- Publication date Jun 27, 2013
- AZ Electronic Materials USA Corp.
- Ninad Shinde
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Tatsuro Nagahara

Person

Patents Grantslast 30 patents

Semiconductor aqueous composition and use of the same

Substrate cleaning solution, and using the same, method for manufac...

Substrate processing method

Substrate pattern filling composition and use of the same

Gap filling composition and pattern forming method using compositio...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Gap filling composition and pattern forming method using low molecu...

Lithography composition, a method for forming resist patterns and a...

Substrate processing method and substrate processing apparatus

Reverse pattern formation composition, reverse pattern formation me...

Inorganic polysilazane resin

Rinse composition, a method for forming resist patterns and a metho...

Composition for resist patterning and method for forming pattern us...

Method for forming of siliceous film and siliceous film formed usin...

Fine resist pattern-forming composition and pattern forming method...

Composition for forming fine resist pattern, and pattern formation...

Method for forming insulating film

Silicon oxynitride film formation method and substrate equipped wit...

Method for forming isolation structure

Method for formation of siliceous film and siliceous film formed by...

Photosensitive polysilazane composition, method of forming pattern...

Patents Applicationslast 30 patents

METHOD FOR REMOVING UPPER PART OF SACRIFICIAL LAYER, AND SACRIFICIA...

SUBSTRATE SURFACE TREATING SOLUTION, AND USING THE SAME, METHOD FOR...

SUBSTRATE TREATING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...

METHOD FOR MANUFACTURING THICKENED RESIST PATTERN, THICKENING SOLUT...

SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...

REPLACEMENT LIQUID OF LIQUID FILLING BETWEEN RESIST PATTERNS, AND M...

SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...

SUBSTRATE CLEANING SOLUTION AND METHOD FOR MANUFACTURING DEVICE

SEMICONDUCTOR AQUEOUS COMPOSITION AND USE OF THE SAME

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

GAP FILLING COMPOSITION AND PATTERN FORMING METHOD USING COMPOSITIO...

A LITHOGRAPHY COMPOSITION, A METHOD FOR FORMING RESIST PATTERNS AND...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

A RINSE COMPOSITION, A METHOD FOR FORMING RESIST PATTERNS AND A MET...

REVERSE PATTERN FORMATION COMPOSITION, REVERSE PATTERN FORMATION ME...

GAP FILLING COMPOSITION AND PATTERN FORMING METHOD USING LOW MOLECU...

SURFACE TREATMENT COMPOSITION AND SURFACE TREATMENT METHOD OF RESIS...

INORGANIC POLYSILAZANE RESIN

COMPOSITION FOR RESIST PATTERNING AND METHOD FOR FORMING PATTERN US...

COMPOSITION FOR FORMING FINE RESIST PATTERN, AND PATTERN FORMATION...

FINE RESIST PATTERN-FORMING COMPOSITION AND PATTERN FORMING METHOD...

METHOD FOR FORMING OF SILICEOUS FILM AND SILICEOUS FILM FORMED USIN...

INORGANIC POLYSILAZANE RESIN

SILICON OXYNITRIDE FILM FORMATION METHOD AND SUBSTRATE EQUIPPED WIT...

METHOD FOR FORMING INSULATING FILM

METHOD FOR PRODUCING SILICON DIOXIDE FILM

METHOD FOR FORMING ISOLATION STRUCTURE

Silicon Oxynitride Film Formation Method and Substrate Equipped wit...