Tatsuro Ohkawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam exposure apparatus and exposure method capabl...
- Patent number 6,414,325
- Issue date Jul 2, 2002
- Advantest Corporation
- Akio Yamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure apparatus and exposure method
- Patent number 6,407,398
- Issue date Jun 18, 2002
- Advantest Corporation
- Masaki Kurokawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle-beam exposure device and charged-particle-beam exp...
- Patent number 6,242,751
- Issue date Jun 5, 2001
- Fujitsu Limited
- Akio Takemoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle-beam exposure device and charged-particle-beam exp...
- Patent number 5,969,365
- Issue date Oct 19, 1999
- Fujitsu Limited
- Akio Takemoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure apparatus
- Patent number 5,966,200
- Issue date Oct 12, 1999
- Fujuitsu Limited
- Kenichi Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam exposure device
- Patent number 5,945,683
- Issue date Aug 31, 1999
- Fujitsu Limited
- Tatsuro Ohkawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam exposure method and apparatus
- Patent number 5,892,237
- Issue date Apr 6, 1999
- Fujitsu Limited
- Kenichi Kawakami
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle-beam exposure device and charged-particle-beam exp...
- Patent number 5,757,015
- Issue date May 26, 1998
- Fujitsu Limited
- Akio Takemoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron-beam exposure device and a method of detecting a mark posi...
- Patent number 5,708,276
- Issue date Jan 13, 1998
- Fujitsu Limited
- Tatsuro Ohkawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged-particle-beam exposure device and charged-particle-beam exp...
- Publication number 20010013581
- Publication date Aug 16, 2001
- Akio Takemoto
- B82 - NANO-TECHNOLOGY

Tatsuro Ohkawa

Person

Patents Grantslast 30 patents

Charged particle beam exposure apparatus and exposure method capabl...

Electron beam exposure apparatus and exposure method

Charged-particle-beam exposure device and charged-particle-beam exp...

Charged-particle-beam exposure device and charged-particle-beam exp...

Charged particle beam exposure apparatus

Electron beam exposure device

Charged particle beam exposure method and apparatus

Charged-particle-beam exposure device and charged-particle-beam exp...

Electron-beam exposure device and a method of detecting a mark posi...

Patents Applicationslast 30 patents

Charged-particle-beam exposure device and charged-particle-beam exp...