Membership
Tour
Register
Log in
Tatsuro Okawa
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam exposure apparatus suitable for drawing on li...
Patent number
9,607,807
Issue date
Mar 28, 2017
Advantest Corp.
Akio Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam exposure apparatus and electron beam exposure method
Patent number
8,487,281
Issue date
Jul 16, 2013
Advantest Corp.
Masaki Kurokawa
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS AND COMPUTER READABLE NON-TRANSITORY STORAGE MEDIUM
Publication number
20180067402
Publication date
Mar 8, 2018
Advantest Corporation
Akio YAMADA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHARGED PARTICLE BEAM EXPOSURE APPARATUS SUITABLE FOR DRAWING ON LI...
Publication number
20160133438
Publication date
May 12, 2016
Advantest Corporation
Akio Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM EXPOSURE APPARATUS AND ELECTRON BEAM EXPOSURE METHOD
Publication number
20120312975
Publication date
Dec 13, 2012
Katsuhiko Kobayashi
B82 - NANO-TECHNOLOGY
Information
Patent Application
ELECTRON BEAM EXPOSURE APPARATUS AND ELECTRON BEAM EXPOSURE METHOD
Publication number
20120256106
Publication date
Oct 11, 2012
Masaki Kurokawa
B82 - NANO-TECHNOLOGY