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Tatsuro Yoshida
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate supporting apparatus
Patent number
7,275,749
Issue date
Oct 2, 2007
Sipec Corporation
Minoru Matsuzawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Cleaning apparatus, cleaning system using cleaning apparatus, clean...
Publication number
20090084409
Publication date
Apr 2, 2009
REALIZE ADVANCED TECHNOLOGY LIMITED
Ryoichi Okura
B08 - CLEANING
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Patent Application
Substrate Treatment Apparatus
Publication number
20070272357
Publication date
Nov 29, 2007
SIPEC CORPORATION
Tamio Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate supporting apparatus
Publication number
20050023773
Publication date
Feb 3, 2005
SIPEC CORPORATION
Minoru Matsuzawa
H01 - BASIC ELECTRIC ELEMENTS