Tatsuru Tanaka

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cryogenic dynamic cooling
- Patent number 10,054,363
- Issue date Aug 21, 2018
- WD Media, LLC
- Chang B. Yi
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Cathode sputtering gas distribution apparatus
- Patent number 9,228,254
- Issue date Jan 5, 2016
- Seagate Technology LLC
- Chang Bok Yi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cooling a planar workpiece in an evacuated...
- Patent number 8,701,753
- Issue date Apr 22, 2014
- Seagate Technology LLC
- Chang Bok Yi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for uniformly implanting materials on substrate...
- Patent number 8,674,327
- Issue date Mar 18, 2014
- WD Media, LLC
- Chin Yim Poon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Biasing a pre-metalized non-conductive substrate
- Patent number 8,573,579
- Issue date Nov 5, 2013
- Seagate Technology LLC
- Chang Bok Yi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system
- Patent number 6,517,691
- Issue date Feb 11, 2003
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CRYOGENIC DYNAMIC COOLING
- Publication number 20160047596
- Publication date Feb 18, 2016
- WD Media, LLC
- CHANG B. YI
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
DUAL SINGLE SIDED SPUTTER CHAMBERS WITH SUSTAINING HEATER
- Publication number 20140050843
- Publication date Feb 20, 2014
- WD MEDIA, INC.
- Chang B. YI
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD AND APPARATUS FOR STATIC BIASING A PRE-METALIZED NON-CONDUCT...
- Publication number 20110212269
- Publication date Sep 1, 2011
- Chang Bok Yi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for rotating magnet cathode sputtering with uniform proce...
- Publication number 20070158186
- Publication date Jul 12, 2007
- Seagate Technology LLC
- Chang Bok Yi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method & apparatus for cathode sputtering with uniform process gas...
- Publication number 20070158181
- Publication date Jul 12, 2007
- Seagate Technology LLC
- Chang Bok Yi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Small volume environmental chamber and multi-chamber processing app...
- Publication number 20050132960
- Publication date Jun 23, 2005
- Seagate Technology LLC
- Tatsuru Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for cooling a planar workpiece in an evacuated...
- Publication number 20040250996
- Publication date Dec 16, 2004
- Seagate Technology LLC
- Chang Bok Yi
- H01 - BASIC ELECTRIC ELEMENTS

Tatsuru Tanaka

Person

Patents Grantslast 30 patents

Method and apparatus for cryogenic dynamic cooling

Cathode sputtering gas distribution apparatus

Method and apparatus for cooling a planar workpiece in an evacuated...

Systems and methods for uniformly implanting materials on substrate...

Biasing a pre-metalized non-conductive substrate

Substrate processing system

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CRYOGENIC DYNAMIC COOLING

DUAL SINGLE SIDED SPUTTER CHAMBERS WITH SUSTAINING HEATER

METHOD AND APPARATUS FOR STATIC BIASING A PRE-METALIZED NON-CONDUCT...

Apparatus for rotating magnet cathode sputtering with uniform proce...

Method & apparatus for cathode sputtering with uniform process gas...

Small volume environmental chamber and multi-chamber processing app...

Method and apparatus for cooling a planar workpiece in an evacuated...