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Tatsushi Hara
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Inagi, JP
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last 30 patents
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Patent Grant
Chemical vapor deposition system
Patent number
5,264,038
Issue date
Nov 23, 1993
Fujitsu Limited
Tatsushi Hara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of forming wiring of a semiconductor device
Patent number
5,066,612
Issue date
Nov 19, 1991
Fujitsu Limited
Takayuki Ohba
H01 - BASIC ELECTRIC ELEMENTS