Tatsushi OWADA

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Light irradiation device and method for patterning self assembled m...
- Patent number 10,061,197
- Issue date Aug 28, 2018
- Ushio Denki Kabushiki Kaisha
- Tatsushi Owada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light source device, light irradiating apparatus equipped with ligh...
- Patent number 9,070,526
- Issue date Jun 30, 2015
- Ushio Denki Kabushiki Kaisha
- Tatsushi Owada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for thermal processing semiconductor wafer with a flash disc...
- Patent number 6,897,130
- Issue date May 24, 2005
- Ushio Denki Kabushiki Kaisya
- Koji Miyauchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INACTIVATION METHOD
- Publication number 20240207115
- Publication date Jun 27, 2024
- Ushio Denki Kabushiki Kaisha
- Hiroyuki OHASHI
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
VACUUM ULTRA VIOLET LIGHT SOURCE DEVICE, LIGHT IRRADIATION DEVICE A...
- Publication number 20170199463
- Publication date Jul 13, 2017
- Ushio Denki Kabushiki Kaisha
- Tatsushi OWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT SOURCE DEVICE, LIGHT IRRADIATING APPARATUS EQUIPPED WITH LIGH...
- Publication number 20140361196
- Publication date Dec 11, 2014
- Ushio Denki Kabushiki Kaisha
- Tatsushi OWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for thermal processing semiconductor wafer
- Publication number 20030114019
- Publication date Jun 19, 2003
- Ushio Denki Kabushiki Kaisya
- Koji Miyauchi
- H01 - BASIC ELECTRIC ELEMENTS