Tatsushi Ueda

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,154,826
- Issue date Nov 26, 2024
- Kokusai Electric Corporation
- Masanori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,040,161
- Issue date Jul 16, 2024
- Kokusai Electric Corporation
- Yasutoshi Tsubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,908,682
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Hiroto Igawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,664,275
- Issue date May 30, 2023
- Kokusai Electric Corporation
- Masanori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, and recording medium
- Patent number 11,081,362
- Issue date Aug 3, 2021
- Kokusai Electric Corporation
- Yuki Yamakado
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,546,761
- Issue date Jan 28, 2020
- Kokusai Electric Corporation
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,192,735
- Issue date Jan 29, 2019
- Kokusai Electric Corporation
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,786,493
- Issue date Oct 10, 2017
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,754,780
- Issue date Sep 5, 2017
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 9,748,132
- Issue date Aug 29, 2017
- Hitachi Kokusai Electric Inc.
- Koichiro Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method, substrate processing app...
- Patent number 9,257,271
- Issue date Feb 9, 2016
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,236,242
- Issue date Jan 12, 2016
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,334,215
- Issue date Dec 18, 2012
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,066,894
- Issue date Nov 29, 2011
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor devi...
- Patent number 7,651,954
- Issue date Jan 26, 2010
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230307295
- Publication date Sep 28, 2023
- Kokusai Electric Corporation
- Masanori NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230201889
- Publication date Jun 29, 2023
- Kokusai Electric Corporation
- Yuki YAMAKADO
- B08 - CLEANING
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230097621
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Hiroto IGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220328289
- Publication date Oct 13, 2022
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Non-transitory Computer-readable Re...
- Publication number 20220301850
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20220301863
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Tatsushi UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20220139675
- Publication date May 5, 2022
- Kokusai Electric Corporation
- Yuki YAMAKADO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20220084816
- Publication date Mar 17, 2022
- Kokusai Electric Corporation
- Keita ICHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220005673
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210305045
- Publication date Sep 30, 2021
- Kokusai Electric Corporation
- Tatsushi UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20210183645
- Publication date Jun 17, 2021
- Kokusai Electric Corporation
- Hiroto IGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200211858
- Publication date Jul 2, 2020
- Kokusai Electric Corporation
- Masanori NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
- Publication number 20200098587
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Yuki YAMAKADO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170338106
- Publication date Nov 23, 2017
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170243764
- Publication date Aug 24, 2017
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160284532
- Publication date Sep 29, 2016
- Hitachi Kokusai Electric Inc.
- Tatsushi UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160153085
- Publication date Jun 2, 2016
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160086797
- Publication date Mar 24, 2016
- Hitachi Kokusai Electric Inc.
- Tatsushi UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20140087567
- Publication date Mar 27, 2014
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...
- Publication number 20130252433
- Publication date Sep 26, 2013
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130095669
- Publication date Apr 18, 2013
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20120252220
- Publication date Oct 4, 2012
- Hitachi Kokusai Electric Inc.
- Koichiro HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20090169768
- Publication date Jul 2, 2009
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20080138994
- Publication date Jun 12, 2008
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Manufacturing method of semiconductor device and semiconductor devi...
- Publication number 20080124941
- Publication date May 29, 2008
- Hitachi Kokusai Electric Inc.
- Tatsushi Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing substrates
- Publication number 20070062646
- Publication date Mar 22, 2007
- Hitachi Kokusai Electric Inc.
- Unryu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing substrates
- Publication number 20020036066
- Publication date Mar 28, 2002
- Hitachi Kokusai Electric Inc.,
- Unryu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS

Tatsushi Ueda

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, and recording medium

Substrate processing apparatus

Substrate processing method and substrate processing apparatus

Method of manufacturing semiconductor device, substrate processing...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus, method for manufacturing semiconduc...

Semiconductor device manufacturing method, substrate processing app...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Manufacturing method of semiconductor device and semiconductor devi...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

CLEANING METHOD, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus, Non-transitory Computer-readable Re...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

Method of Manufacturing Semiconductor Device, Substrate Processing...

Method of Manufacturing Semiconductor Device, Substrate Processing...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device, Substrate Processing...

Method of Manufacturing Semiconductor Device, Substrate Processing...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APP...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

Substrate processing method and substrate processing apparatus

Substrate Processing Method and Substrate Processing Apparatus

Manufacturing method of semiconductor device and semiconductor devi...

Method and apparatus for processing substrates

Method and apparatus for processing substrates