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Tatsutoshi SUZUKI
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Yokkaichi-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Planarization processing device
Patent number
10,770,301
Issue date
Sep 8, 2020
TOHO ENGINEERING CO., LTD.
Tatsutoshi Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarizing processing method and planarizing processing device
Patent number
10,665,480
Issue date
May 26, 2020
Osaka University
Eisuke Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarizing processing method and planarizing processing device
Patent number
10,199,242
Issue date
Feb 5, 2019
Osaka University
Eisuke Suzuki
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate polishing apparatus
Patent number
9,082,715
Issue date
Jul 14, 2015
TOHO ENGINEERING CO., LTD.
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad auxiliary plate and polishing device equipped with po...
Patent number
8,992,288
Issue date
Mar 31, 2015
Toho Engineering Kabushiki Kaisha
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad sub plate
Patent number
8,702,477
Issue date
Apr 22, 2014
Toho Engineering
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Grant
Method of regenerating a polishing pad using a polishing pad sub plate
Patent number
8,702,474
Issue date
Apr 22, 2014
Toho Engineering
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad
Patent number
7,867,066
Issue date
Jan 11, 2011
Toho Engineering Kabushiki Kaisha
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Grant
Method of producing polishing pad
Patent number
7,516,536
Issue date
Apr 14, 2009
Toho Engineering Kabushiki Kaisha
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Grant
Turning tool for grooving polishing pad, apparatus and method of pr...
Patent number
7,140,088
Issue date
Nov 28, 2006
Toho Engineering Kabushiki Kaisha
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Polishing pad and method of fabricating semiconductor substrate usi...
Patent number
7,121,938
Issue date
Oct 17, 2006
Toho Engineering Kabushiki Kaisha
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Grant
Turning tool for grooving polishing pad, apparatus and method of pr...
Patent number
7,104,868
Issue date
Sep 12, 2006
Toho Engineering Kabushiki Kaisha
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Turning tool for grooving polishing pad, apparatus and method of pr...
Patent number
7,017,246
Issue date
Mar 28, 2006
Toho Engineering Kabushiki Kaisha
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Turning tool for grooving polishing pad, apparatus and method of pr...
Patent number
6,869,343
Issue date
Mar 22, 2005
Toho Engineering Kabushiki Kaisha
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
PLANARIZING PROCESSING METHOD AND PLANARIZING PROCESSING DEVICE
Publication number
20190122904
Publication date
Apr 25, 2019
Toho Engineering Co., Ltd.
Eisuke SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION PROCESSING DEVICE
Publication number
20180277380
Publication date
Sep 27, 2018
Tatsutoshi SUZUKI
B24 - GRINDING POLISHING
Information
Patent Application
PLANARIZING PROCESSING METHOD AND PLANARIZING PROCESSING DEVICE
Publication number
20170098559
Publication date
Apr 6, 2017
Toho Engineering Co., Ltd.
Eisuke SUZUKI
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE POLISHING APPARATUS
Publication number
20140051249
Publication date
Feb 20, 2014
Toho Engineering Co., Ltd.
Tatsutoshi SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING PAD AUXILIARY PLATE AND POLISHING DEVICE EQUIPPED WITH PO...
Publication number
20130029566
Publication date
Jan 31, 2013
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi SUZUKI
B24 - GRINDING POLISHING
Information
Patent Application
Method of Regenerating a Polishing Pad Using a Polishing Pad Sub Plate
Publication number
20120003903
Publication date
Jan 5, 2012
Toho Engineering
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Application
Polishing Pad Sub Plate
Publication number
20110319000
Publication date
Dec 29, 2011
Toho Engineering
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Application
Polishing Pad
Publication number
20080064311
Publication date
Mar 13, 2008
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad and method of fabricating semiconductor substrate usi...
Publication number
20070032182
Publication date
Feb 8, 2007
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Application
Method of producing polishing pad
Publication number
20060154577
Publication date
Jul 13, 2006
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Application
Turning tool for grooving polishing pad, apparatus and method of pr...
Publication number
20060137170
Publication date
Jun 29, 2006
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Turning tool for grooving polishing pad, apparatus and method of pr...
Publication number
20040209551
Publication date
Oct 21, 2004
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Turning tool for grooving polishing pad, apparatus and method of pr...
Publication number
20040198204
Publication date
Oct 7, 2004
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Turning tool for grooving polishing pad, apparatus and method of pr...
Publication number
20040198199
Publication date
Oct 7, 2004
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Polishing pad and semiconductor substrate manufacturing method usin...
Publication number
20040198056
Publication date
Oct 7, 2004
Tatsutoshi Suzuki
B24 - GRINDING POLISHING
Information
Patent Application
Turning tool for grooving polishing pad, apparatus and method of pr...
Publication number
20030119425
Publication date
Jun 26, 2003
TOHO ENGINEERING KABUSHIKI KAISHA
Tatsutoshi Suzuki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR