Tatsuya Aota

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and a method for inspection of a mask blank, a method for...
- Patent number 7,911,600
- Issue date Mar 22, 2011
- Renesas Electronics Corporation
- Tsuneo Terasawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND A METHOD FOR INSPECTION OF A MASK BLANK, A METHOD FOR...
- Publication number 20090091752
- Publication date Apr 9, 2009
- RENESAS TECHNOLOGY CORP.
- Tsuneo TERASAWA
- G01 - MEASURING TESTING