Tatsuya Hayashi

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 12,153,343
- Issue date Nov 26, 2024
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatuses and article manufacturing methods applying visc...
- Patent number 12,099,295
- Issue date Sep 24, 2024
- Canon Kabushiki Kaisha
- Hiroyuki Koide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 12,085,850
- Issue date Sep 10, 2024
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method for manufacturing article
- Patent number 11,904,522
- Issue date Feb 20, 2024
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and method for manufacturing art...
- Patent number 11,480,872
- Issue date Oct 25, 2022
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and method for producing article
- Patent number 10,642,171
- Issue date May 5, 2020
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Pattern formation method and article manufacturing method
- Patent number 10,564,541
- Issue date Feb 18, 2020
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprinting method, and manufacturing method of a...
- Patent number 10,403,508
- Issue date Sep 3, 2019
- Canon Kabushiki Kaisha
- Yusuke Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, and method of manufacturing article
- Patent number 10,359,696
- Issue date Jul 23, 2019
- Canon Kabushiki Kaisha
- Yosuke Murakami
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus
- Patent number 9,851,634
- Issue date Dec 26, 2017
- Canon Kabushiki Kaisha
- Yozo Matsuda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and article manufacturing method using same
- Patent number 9,594,301
- Issue date Mar 14, 2017
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and method of manufacturing a device
- Patent number 9,164,395
- Issue date Oct 20, 2015
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 8,678,808
- Issue date Mar 25, 2014
- Canon Kabushiki Kaisha
- Setsuo Yoshida
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus
- Patent number 8,115,901
- Issue date Feb 14, 2012
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,932,990
- Issue date Apr 26, 2011
- Canon Kabushiki Kaisha
- Hisashi Namba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 7,692,762
- Issue date Apr 6, 2010
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus, and device manufacturing method
- Patent number 7,633,597
- Issue date Dec 15, 2009
- Canon Kabushiki Kaisha
- Hisashi Namba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 7,561,249
- Issue date Jul 14, 2009
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,423,724
- Issue date Sep 9, 2008
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Technique of suppressing influence of contamination of exposure atm...
- Patent number 7,391,498
- Issue date Jun 24, 2008
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20250044683
- Publication date Feb 6, 2025
- Canon Kabushiki Kaisha
- TATSUYA HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20230194981
- Publication date Jun 22, 2023
- Canon Kabushiki Kaisha
- TATSUYA HAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS FOR FORMING A PATTERN OF AN IMPRINT MATERIAL ON A...
- Publication number 20220121112
- Publication date Apr 21, 2022
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR MANUFACTURING ART...
- Publication number 20210132492
- Publication date May 6, 2021
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20200363715
- Publication date Nov 19, 2020
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200333704
- Publication date Oct 22, 2020
- Canon Kabushiki Kaisha
- Hiroyuki Koide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT APPARATUS AND METHOD FOR MANUFACTURING ARTICLE
- Publication number 20200223126
- Publication date Jul 16, 2020
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, METHOD OF IMPRINTING, METHOD FOR PRODUCING ARTIC...
- Publication number 20170282419
- Publication date Oct 5, 2017
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PATTERN FORMATION METHOD AND ARTICLE MANUFACTURING METHOD
- Publication number 20170227855
- Publication date Aug 10, 2017
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOLD REPLICATING METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20170210036
- Publication date Jul 27, 2017
- Canon Kabushiki Kaisha
- Zenichi Hamaya
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINTING METHOD, AND MANUFACTURING METHOD OF A...
- Publication number 20170057153
- Publication date Mar 2, 2017
- Canon Kabushiki Kaisha
- Yusuke Tanaka
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF PRODUCING ARTICLE
- Publication number 20170057154
- Publication date Mar 2, 2017
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR PRODUCING ARTICLE
- Publication number 20160363874
- Publication date Dec 15, 2016
- Canon Kabushiki Kaisha
- Takahiro Matsumoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150108674
- Publication date Apr 23, 2015
- Canon Kabushiki Kaisha
- Yosuke MURAKAMI
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20150001751
- Publication date Jan 1, 2015
- Yozo Matsuda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20130093113
- Publication date Apr 18, 2013
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF CLEANING PIPE OF IMMERSION EXPOSURE APPARATUS, AND METHOD...
- Publication number 20120257180
- Publication date Oct 11, 2012
- Canon Kabushiki Kaisha
- Masayuki TANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING A DEVICE
- Publication number 20120170007
- Publication date Jul 5, 2012
- Canon Kabushiki Kaisha
- Keita Sakai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20120086149
- Publication date Apr 12, 2012
- Canon Kabushiki Kaisha
- Setsuo YOSHIDA
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090237638
- Publication date Sep 24, 2009
- Canon Kabushiki Kaisha
- Tomofumi Nishikawara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090207391
- Publication date Aug 20, 2009
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20090128795
- Publication date May 21, 2009
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080285713
- Publication date Nov 20, 2008
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080030705
- Publication date Feb 7, 2008
- Canon Kabushiki Kaisha
- Hisashi Namba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20070236673
- Publication date Oct 11, 2007
- Hisashi Namba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060215137
- Publication date Sep 28, 2006
- Canon Kabushiki Kaisha
- Noriyasu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and device manufacturing method
- Publication number 20060209281
- Publication date Sep 21, 2006
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Technique of suppressing influence of contamination of exposure atm...
- Publication number 20050069433
- Publication date Mar 31, 2005
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tatsuya Hayashi

Person

Patents Grantslast 30 patents

Imprint method, imprint apparatus, and article manufacturing method

Imprint apparatuses and article manufacturing methods applying visc...

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus and method for manufacturing article

Imprint apparatus, imprint method, and method for manufacturing art...

Imprint apparatus, imprint method, and method for producing article

Pattern formation method and article manufacturing method

Imprint apparatus, imprinting method, and manufacturing method of a...

Imprint apparatus, and method of manufacturing article

Imprint apparatus

Imprint apparatus and article manufacturing method using same

Exposure apparatus, and method of manufacturing a device

Imprint apparatus and article manufacturing method

Exposure apparatus

Exposure apparatus

Exposure apparatus

Exposure method and apparatus, and device manufacturing method

Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus and device manufacturing method

Technique of suppressing influence of contamination of exposure atm...

Patents Applicationslast 30 patents

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS FOR FORMING A PATTERN OF AN IMPRINT MATERIAL ON A...

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR MANUFACTURING ART...

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND METHOD FOR MANUFACTURING ARTICLE

IMPRINT APPARATUS, METHOD OF IMPRINTING, METHOD FOR PRODUCING ARTIC...

PATTERN FORMATION METHOD AND ARTICLE MANUFACTURING METHOD

MOLD REPLICATING METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURI...

IMPRINT APPARATUS, IMPRINTING METHOD, AND MANUFACTURING METHOD OF A...

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF PRODUCING ARTICLE

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR PRODUCING ARTICLE

IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME

METHOD OF CLEANING PIPE OF IMMERSION EXPOSURE APPARATUS, AND METHOD...

EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING A DEVICE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE APPARATUS

EXPOSURE APPARATUS

EXPOSURE APPARATUS

EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD

Exposure apparatus and device manufacturing method

Exposure apparatus, exposure method, and device manufacturing method

Technique of suppressing influence of contamination of exposure atm...