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Tatsuya INOUE
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Fukushima-Ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma treated metal silicide layer formation
Patent number
7,902,056
Issue date
Mar 8, 2011
Spansion LLC
Takayuki Enda
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
PLASMA TREATED METAL SILICIDE LAYER FORMATION
Publication number
20090053867
Publication date
Feb 26, 2009
Takayuki ENDA
H01 - BASIC ELECTRIC ELEMENTS