Tatsuya Matsumi

Follow

Person

Sagamihara-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical amplification type positive resist composition, resist lam...
- Patent number 7,150,956
- Issue date Dec 19, 2006
- Tokyo Ohka Kogyo Co., Ltd.
- Kazuyuki Nitta
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for decreasing surface defects of patterned resist layer
- Patent number 7,094,924
- Issue date Aug 22, 2006
- Tokyo Ohka Kogyo Co., Ltd.
- Kazuyuki Nitta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positive resist composition of chemical amplification type, resist...
- Patent number 6,921,621
- Issue date Jul 26, 2005
- Tokyo Ohka Kogyo Co., Ltd.
- Kazuyuki Nitta
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for decreasing surface defects of patterned resist layer
- Patent number 6,605,417
- Issue date Aug 12, 2003
- Tokyo Ohka Kogyo Co., Ltd.
- Kazuyuki Nitta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Chemical amplification type positive resist composition, resist lam...
- Publication number 20050112498
- Publication date May 26, 2005
- Toyko Ohka Kogyo Co., Ltd.
- Kazuyuki Nitta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positive resist composition of chemical amplification type, resist...
- Publication number 20030190550
- Publication date Oct 9, 2003
- Kazuyuki Nitta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for decreasing surface defects of patterned resist layer
- Publication number 20030138736
- Publication date Jul 24, 2003
- Kazuyuki Nitta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for decreasing surface defects of patterned resist layer
- Publication number 20010014431
- Publication date Aug 16, 2001
- Kazuyuki Nitta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY