Tatsuya Miura

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature control method, control apparatus, and plasma processin...
- Patent number 10,254,774
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Tatsuya Miura
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, substrate processing method and sub...
- Patent number 10,128,121
- Issue date Nov 13, 2018
- Tokyo Electron Limited
- Mitsuru Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND SUB...
- Publication number 20170040177
- Publication date Feb 9, 2017
- TOKYO ELECTRON LIMITED
- Mitsuru SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD, CONTROL APPARATUS, AND PLASMA PROCESSIN...
- Publication number 20140288726
- Publication date Sep 25, 2014
- Tatsuya Miura
- H01 - BASIC ELECTRIC ELEMENTS