Tatsuya MUKOYAMA

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Nirasaki City, Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of opening/closing lid of...
- Patent number 11,569,112
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Eiki Endo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONVEYANCE METHOD AND PROCESSING SYSTEM
- Publication number 20230411194
- Publication date Dec 21, 2023
- TOKYO ELECTRON LIMITED
- Wataru NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF OPENING/CLOSING LID OF...
- Publication number 20210375655
- Publication date Dec 2, 2021
- Tokyo Electron Limited
- Eiki ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210280445
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Wataru NAKAGOMI
- H01 - BASIC ELECTRIC ELEMENTS