Tatsuya MUROFUSHI

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Gotemba-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 10,622,186
- Issue date Apr 14, 2020
- NuFlare Technology, Inc.
- Takuya Uemura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, DISCHARGE DETECTION METHOD...
- Publication number 20250037969
- Publication date Jan 30, 2025
- NuFlare Technology, Inc.
- Tatsuya MUROFUSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGE DETECTION APPARATUS AND CHARGED PARTICLE BEAM IRRADIATION...
- Publication number 20230064343
- Publication date Mar 2, 2023
- NuFlare Technology, Inc.
- Tatsuya MUROFUSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20190189389
- Publication date Jun 20, 2019
- NuFlare Technology, Inc.
- Takuya UEMURA
- H01 - BASIC ELECTRIC ELEMENTS