Tatsuya Nagamatsu

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 9,321,085
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Teruomi Minami
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus
- Patent number 9,192,878
- Issue date Nov 24, 2015
- Tokyo Electron Limited
- Shogo Mizota
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20140182455
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Shogo Mizota
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20130133695
- Publication date May 30, 2013
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- B08 - CLEANING