Tatsuya Nishimura

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cooling window foils of electron beam acce...
- Patent number 5,877,582
- Issue date Mar 2, 1999
- Ebara Corporation
- Tatsuya Nishimura
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of and apparatus for generating low-energy neutral particle...
- Patent number 5,432,342
- Issue date Jul 11, 1995
- Ebara Corporation
- Tatsuya Nishimura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for etching semiconductor wafer
- Patent number 5,395,474
- Issue date Mar 7, 1995
- Ebara Corporation
- Hidenao Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron accelerator
- Patent number 5,227,700
- Issue date Jul 13, 1993
- Ebara Corporation
- Kazutoshi Nagai
- H01 - BASIC ELECTRIC ELEMENTS