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Yamanashi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
Patent number
9,299,540
Issue date
Mar 29, 2016
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer method and storage medium
Patent number
9,002,494
Issue date
Apr 7, 2015
Tokyo Electron Limited
Eiki Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma processing method, and storage...
Patent number
8,864,934
Issue date
Oct 21, 2014
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate replacing method and substrate processing apparatus
Patent number
8,663,489
Issue date
Mar 4, 2014
Tokyo Electron Limited
Shigeru Ishizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate transfer method adopte...
Patent number
8,423,176
Issue date
Apr 16, 2013
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer method, control program, and storage medium stor...
Patent number
8,140,181
Issue date
Mar 20, 2012
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate transfer method adopte...
Patent number
8,078,311
Issue date
Dec 13, 2011
Tokyo Electron Limited
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for recovering object to be treated after interruption
Patent number
6,162,010
Issue date
Dec 19, 2000
Tokyo Electron Limited
Shigeru Ishizawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
Publication number
20150001181
Publication date
Jan 1, 2015
TOKYO ELECTRON LIMITED
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND STORAGE...
Publication number
20120248067
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ANALYZING CAUSE OF ABNORMALITY AND PROGRAM ANALYZING ABNO...
Publication number
20120101758
Publication date
Apr 26, 2012
TOKYO ELECTRON LIMITED
Tatsuya OGI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE TRANSFER METHOD AND STORAGE MEDIUM
Publication number
20120059502
Publication date
Mar 8, 2012
TOKYO ELECTRON LIMITED
Eiki Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD ADOPTE...
Publication number
20120004753
Publication date
Jan 5, 2012
TOKYO ELECTRON LIMITED
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE REPLACING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100252532
Publication date
Oct 7, 2010
TOKYO ELECTRON LIMITED
SHIGERU ISHIZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER METHOD, CONTROL PROGRAM, AND STORAGE MEDIUM STOR...
Publication number
20100094452
Publication date
Apr 15, 2010
TOKYO ELECTRON LIMITED
Tatsuya OGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing apparatus and substrate transfer method adopte...
Publication number
20060182533
Publication date
Aug 17, 2006
TOKYO ELECTRON LIMITED
Tatsuya Ogi
H01 - BASIC ELECTRIC ELEMENTS