Tatsuya WATANABE

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and temperature regulation method
- Patent number 12,341,039
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Tatsuya Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250051922
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Hisashi INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD
- Publication number 20240404849
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD
- Publication number 20240014054
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD
- Publication number 20230416919
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CORRECTION INFORMATION CALCULATING DEVICE, SEMICONDUCTO...
- Publication number 20220406631
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CORRECTION INFORMATION CALCULATION DEVICE, SEMICONDUCTO...
- Publication number 20220392814
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Tatsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS

Tatsuya WATANABE

Person

Patents Grantslast 30 patents

Substrate processing apparatus and temperature regulation method

Patents Applicationslast 30 patents

TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND DISPLAY METHOD

SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD

SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE REGULATION METHOD

TEMPERATURE CORRECTION INFORMATION CALCULATING DEVICE, SEMICONDUCTO...

TEMPERATURE CORRECTION INFORMATION CALCULATION DEVICE, SEMICONDUCTO...