Tatsuyuki URATA

Follow

Person

Fukuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Alignment and transport of substrate and focus ring
- Patent number 12,131,936
- Issue date Oct 29, 2024
- Keisuke Yoshino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ALLIGNMENT AND TRANSPORT OF SUBSTRATE AND FOCUS RING
- Publication number 20220059384
- Publication date Feb 24, 2022
- KABUSHIKI KAISHA YASKAWA DENKI
- Keisuke YOSHINO
- H01 - BASIC ELECTRIC ELEMENTS