Tatuharu Yamamoto

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Higashimurayama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate temperature control system and method for controlling tem...
- Patent number 6,518,548
- Issue date Feb 11, 2003
- Hitachi, Ltd.
- Masakazu Sugaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate temperature control system and method for controlling tem...
- Patent number 6,394,797
- Issue date May 28, 2002
- Hitachi, Ltd.
- Masakazu Sugaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fabricating semiconductor devices
- Patent number 5,981,399
- Issue date Nov 9, 1999
- Hitachi, Ltd.
- Yoshio Kawamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method and equipment for processing a semiconductor devi...
- Patent number 5,628,828
- Issue date May 13, 1997
- Hitachi., Ltd.
- Yoshio Kawamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate temperature control system and method for controlling tem...
- Publication number 20020113056
- Publication date Aug 22, 2002
- Hitachi, Ltd.
- Masakazu Sugaya
- H01 - BASIC ELECTRIC ELEMENTS