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Tatyana Victorovna Rakhimova
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Moscow, RU
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Patents Grants
last 30 patents
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Patent Grant
Imprint lithography
Patent number
8,454,849
Issue date
Jun 4, 2013
ASML Netherlands B.V.
Sander Frederik Wuister
B82 - NANO-TECHNOLOGY
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Patent Grant
Lithographic apparatus comprising an electrical discharge generator...
Patent number
8,317,929
Issue date
Nov 27, 2012
ASML Netherlands B.V.
Tatyana Victorovna Rakhimova
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
IMPRINT LITHOGRAPHY
Publication number
20110226735
Publication date
Sep 22, 2011
ASML NETHERLANDS B.V.
Sander Frederik Wuister
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic apparatus comprising an electrical discharge generator...
Publication number
20070062557
Publication date
Mar 22, 2007
ASML NETHERLANDS B.V.
Tatyana Victorovna Rakhimova
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY