Tauno VÄHÄ-HEIKKILÄ

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VTT, FI

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Patents Grantslast 30 patents

Information Patent Grant
Capacitive micro structure
- Patent number 11,548,779
- Issue date Jan 10, 2023
- Teknologian tutkimuskeskus VTT Oy
- Hannu Kattelus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Probe apparatus
- Patent number 11,486,900
- Issue date Nov 1, 2022
- Teknologian tutkimuskeskus VTT Oy
- Vladimir Ermolov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus
- Patent number 11,380,600
- Issue date Jul 5, 2022
- Teknologian tutkimuskeskus VTT Oy
- Heikki Viljanen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR APPARATUS
- Publication number 20220301968
- Publication date Sep 22, 2022
- Teknologian Tutkimuskeskus VTT Oy
- Heikki VILJANEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE MICRO STRUCTURE
- Publication number 20200180943
- Publication date Jun 11, 2020
- Teknologian Tutkimuskeskus VTT Oy
- Hannu KATTELUS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE APPARATUS
- Publication number 20200158757
- Publication date May 21, 2020
- Teknologian Tutkimuskeskus VTT Oy
- Vladimir ERMOLOV
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR APPARATUS
- Publication number 20200152537
- Publication date May 14, 2020
- Teknologian Tutkimuskeskus VTT Oy
- Heikki VILJANEN
- H01 - BASIC ELECTRIC ELEMENTS