Te-Chia Hsu

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Zhubei City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Slurry supply system for CMP process
- Patent number 8,992,287
- Issue date Mar 31, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Chen Wang
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Slurry Sluppy System for CMP Process
- Publication number 20130143474
- Publication date Jun 6, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Sheng-Chen Wang
- B24 - GRINDING POLISHING