Te Ching Chang

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition method and apparatus
- Patent number 8,734,901
- Issue date May 27, 2014
- Tokyo Electron Limited
- Keisuke Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION METHOD AND APPARATUS
- Publication number 20120269969
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Keisuke SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...