Te-Hung Hsieh

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Miaoli County, TW

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Patents Applicationslast 30 patents

Information Patent Application
RF coil design for improved film uniformity of an ion metal plasma...
- Publication number 20050098427
- Publication date May 12, 2005
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Mu Cho
- H01 - BASIC ELECTRIC ELEMENTS