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Te-Sheng WANG
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Simulation-assisted alignment between metrology image and design
Patent number
11,669,018
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Te-Sheng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for process-window characterization
Patent number
11,592,752
Issue date
Feb 28, 2023
ASML Netherlands B.V.
Te-Sheng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement method and apparatus
Patent number
11,243,473
Issue date
Feb 8, 2022
ASML Netherlands B.V.
Te-Sheng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Simulation-assisted alignment between metrology image and design
Patent number
11,029,609
Issue date
Jun 8, 2021
ASML Netherlands B.V.
Te-Sheng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Displacement based overlay or alignment
Patent number
10,852,646
Issue date
Dec 1, 2020
ASML Netherlands B.V.
Marinus Jochemsen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for process-window characterization
Patent number
10,656,531
Issue date
May 19, 2020
ASML Netherlands B.V.
Te-Sheng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Hotspot aware dose correction
Patent number
10,372,043
Issue date
Aug 6, 2019
ASML Netherlands B.V.
Gang Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Indirect determination of a processing parameter
Patent number
10,359,705
Issue date
Jul 23, 2019
ASML Netherlands B.V.
Te-Sheng Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR DETERMINING LOCAL FOCUS POINTS DURING INSPECT...
Publication number
20240183806
Publication date
Jun 6, 2024
ASML NETHERLANDS B.V.
Te-Sheng WANG
G01 - MEASURING TESTING
Information
Patent Application
SIMULATION-ASSISTED METROLOGY IMAGE ALIGNMENT
Publication number
20230401727
Publication date
Dec 14, 2023
ASML NETHERLANDS B.V.
Te-Sheng WANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION
Publication number
20230133487
Publication date
May 4, 2023
ASML NETHERLANDS B.V.
Te-Sheng WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD IN THE MANUFACTURING PROCESS OF A DEVICE, A NON-TRANSITORY C...
Publication number
20210407112
Publication date
Dec 30, 2021
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SIMULATION-ASSISTED ALIGNMENT BETWEEN METROLOGY IMAGE AND DESIGN
Publication number
20210294219
Publication date
Sep 23, 2021
ASML NETHERLANDS B.V.
Te-Sheng WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION
Publication number
20200278613
Publication date
Sep 3, 2020
ASML NETHERLANDS B.V.
Te-Sheng WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS
Publication number
20200159124
Publication date
May 21, 2020
ASML NETHERLANDS B.V.
Te-Sheng WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SIMULATION-ASSISTED ALIGNMENT BETWEEN METROLOGY IMAGE AND DESIGN
Publication number
20200089122
Publication date
Mar 19, 2020
ASML NETHERLANDS B.V.
Te-Sheng WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION
Publication number
20190258169
Publication date
Aug 22, 2019
ASML NETHERLANDS B.V.
Te-Sheng WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DISPLACEMENT BASED OVERLAY OR ALIGNMENT
Publication number
20190146358
Publication date
May 16, 2019
ASML NETHERLANDS B.V.
Marinus JOCHEMSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INDIRECT DETERMINATION OF A PROCESSING PARAMETER
Publication number
20180321596
Publication date
Nov 8, 2018
ASML NETHERLANDS B.V.
Te-Sheng WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HOTSPOT AWARE DOSE CORRECTION
Publication number
20180259858
Publication date
Sep 13, 2018
ASML NETHERLANDS B.V.
Gang CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY