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Patents Grants
last 30 patents
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Patent Grant
Particle beam inspection apparatus
Patent number
11,942,340
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Jeroen Gerard Gosen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam inspection apparatus
Patent number
11,430,678
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Jeroen Gerard Gosen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PARTICLE BEAM INSPECTION APPARATUS
Publication number
20240258138
Publication date
Aug 1, 2024
ASML NETHERLANDS B.V.
Jeroen Gerard GOSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM ARRAY GEOMETRY OPTIMIZER FOR MULTI-BEAM INSPECTION SYSTEM
Publication number
20230086984
Publication date
Mar 23, 2023
ASML NETHERLANDS B.V.
Te-Yu CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM INSPECTION APPARATUS
Publication number
20220415678
Publication date
Dec 29, 2022
ASML NETHERLANDS B.V.
Jeroen Gerard GOSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM INSPECTION APPARATUS
Publication number
20200027763
Publication date
Jan 23, 2020
ASML Netherlands B.V.
Jeroen Gerard GOSEN
H01 - BASIC ELECTRIC ELEMENTS