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Ted Dziura
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San Jose, CA, US
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last 30 patents
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Patent Grant
Parametric profiling using optical spectroscopic systems
Patent number
7,826,071
Issue date
Nov 2, 2010
KLA-Tencor Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
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Patent Grant
Parametric profiling using optical spectroscopic systems
Patent number
7,280,230
Issue date
Oct 9, 2007
KLA-Tencor Technologies Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Parametric Profiling Using Optical Spectroscopic Systems
Publication number
20090135416
Publication date
May 28, 2009
KLA-Tencor Technologies Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
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Patent Application
Parametric profiling using optical spectroscopic systems
Publication number
20040070772
Publication date
Apr 15, 2004
Andrei V. Shchegrov
G01 - MEASURING TESTING