Ted Minshall

Person

Sherwood, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Valve manifold deadleg elimination via reentrant flow path
- Patent number 9,920,844
- Issue date Mar 20, 2018
- Lam Research Corporation
- Karl Leeser
- B08 - CLEANING
Information Patent Grant
Systems and methods for reducing backside deposition and mitigating...
- Patent number 9,852,901
- Issue date Dec 26, 2017
- Lam Research Corporation
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 9,793,096
- Issue date Oct 17, 2017
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer centering in pocket to improve azimuthal thickness uniformity...
- Patent number 9,698,042
- Issue date Jul 4, 2017
- Lam Research Corporation
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for reducing backside deposition and mitigating...
- Patent number 9,460,915
- Issue date Oct 4, 2016
- Lam Research Corporation
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...
- Publication number 20160372318
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH
- Publication number 20160147234
- Publication date May 26, 2016
- LAM RESEARCH CORPORATION
- Karl Leeser
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...
- Publication number 20160079057
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Sesha Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Suppressing Parasitic Plasma and Reducing W...
- Publication number 20160079036
- Publication date Mar 17, 2016
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Ted Minshall

Person

Patents Grantslast 30 patents

Systems and methods for suppressing parasitic plasma and reducing w...

Systems and methods for suppressing parasitic plasma and reducing w...

Valve manifold deadleg elimination via reentrant flow path

Systems and methods for reducing backside deposition and mitigating...

Systems and methods for suppressing parasitic plasma and reducing w...

Wafer centering in pocket to improve azimuthal thickness uniformity...

Systems and methods for reducing backside deposition and mitigating...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...

VALVE MANIFOLD DEADLEG ELIMINATION VIA REENTRANT FLOW PATH

SYSTEMS AND METHODS FOR REDUCING BACKSIDE DEPOSITION AND MITIGATING...

Systems and Methods for Suppressing Parasitic Plasma and Reducing W...