Teiichi Kimura

Person

  • Itami-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Dry etching method

    • Patent number 6,875,698
    • Issue date Apr 5, 2005
    • Matsushita Electric Industrial Co., Ltd.
    • Kiyohiko Takagi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus

    • Patent number 6,217,714
    • Issue date Apr 17, 2001
    • Matsushita Electric Industrial Co., Ltd.
    • Munekazu Nishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering method and apparatus

    • Patent number 6,176,980
    • Issue date Jan 23, 2001
    • Matsushita Electric Industrial Co., Ltd.
    • Isamu Aokura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma processing apparatus

    • Publication number 20040139917
    • Publication date Jul 22, 2004
    • Naoshi Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Dry etching method

    • Publication number 20010055886
    • Publication date Dec 27, 2001
    • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    • Kiyohiko Takagi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...