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Teiichi Kimura
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Itami-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Dry etching method
Patent number
6,875,698
Issue date
Apr 5, 2005
Matsushita Electric Industrial Co., Ltd.
Kiyohiko Takagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus
Patent number
6,217,714
Issue date
Apr 17, 2001
Matsushita Electric Industrial Co., Ltd.
Munekazu Nishihara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering method and apparatus
Patent number
6,176,980
Issue date
Jan 23, 2001
Matsushita Electric Industrial Co., Ltd.
Isamu Aokura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Plasma processing apparatus
Publication number
20040139917
Publication date
Jul 22, 2004
Naoshi Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Dry etching method
Publication number
20010055886
Publication date
Dec 27, 2001
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Kiyohiko Takagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...