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Teis Johan COENEN
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology measurement method and apparatus
Patent number
12,140,875
Issue date
Nov 12, 2024
ASML Netherlands B.V.
Ilse Van Weperen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle beam apparatus, defect repair method, lithographic exposur...
Patent number
11,996,267
Issue date
May 28, 2024
ASML Netherlands B.V.
Ruben Cornelis Maas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for determining a radiation beam intensity pro...
Patent number
11,353,796
Issue date
Jun 7, 2022
ASML Netherlands B.V.
Teis Johan Coenen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Methods and apparatus for metrology
Patent number
10,996,568
Issue date
May 4, 2021
ASML Netherlands B.V.
Petrus Wilhelmus Smorenburg
G01 - MEASURING TESTING
Information
Patent Grant
Determining an edge roughness parameter of a periodic structure
Patent number
10,725,387
Issue date
Jul 28, 2020
ASML Netherlands B.V.
Teis Johan Coenen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology apparatus for and a method of determining a characteristi...
Patent number
10,670,974
Issue date
Jun 2, 2020
ASML Netherlands B.V.
Gerrit Jacobus Hendrik Brussaard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electron injector and free electron laser
Patent number
10,103,508
Issue date
Oct 16, 2018
ASML Netherlands B.V.
Andrey Alexandrovich Nikipelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation source
Patent number
9,853,412
Issue date
Dec 26, 2017
ASML Netherlands B.V.
Andrey Alexandrovich Nikipelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron injector and free electron laser
Patent number
9,728,931
Issue date
Aug 8, 2017
ASML Netherlands B.V.
Andrey Alexandrovich Nikipelov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
Publication number
20230350301
Publication date
Nov 2, 2023
ASML NETHERLANDS B.V.
Evgenia KURGANOVA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY MEASUREMENT METHOD AND APPARATUS
Publication number
20230100123
Publication date
Mar 30, 2023
ASML NETHERLANDS B.V.
Ilse VAN WEPEREN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CORRECTING MEASUREMENTS IN THE MANUFACTURE OF INTEGRATED...
Publication number
20230040124
Publication date
Feb 9, 2023
ASML NETHERLANDS B.V.
Han-Kwang NIENHUYS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
Publication number
20220213593
Publication date
Jul 7, 2022
ASML NETHERLANDS B.V.
Tamara DRUZHININA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE BEAM APPARATUS, DEFECT REPAIR METHOD, LITHOGRAPHIC EXPOSUR...
Publication number
20210327678
Publication date
Oct 21, 2021
ASML NETHERLANDS B.V.
Ruben Cornelis MAAS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Apparatus for Metrology
Publication number
20200201192
Publication date
Jun 25, 2020
ASML NETHERLANDS B.V.
Petrus Wilhelmus SMORENBURG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Determining a Radiation Beam Intensity Pro...
Publication number
20200098486
Publication date
Mar 26, 2020
ASML NETHERLANDS B.V.
Teis Johan COENEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Apparatus for and a Method of Determining a Characteristi...
Publication number
20190204757
Publication date
Jul 4, 2019
ASML NETHERLANDS B.V.
Gerrit Jacobus Hendrik BRUSSAARD
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETERMINING AN EDGE ROUGHNESS PARAMETER OF A PERIODIC STRUCTURE
Publication number
20190025706
Publication date
Jan 24, 2019
ASML NETHERLANDS B.V.
Teis Johan COENEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Electron Injector and Free Electron Laser
Publication number
20170264071
Publication date
Sep 14, 2017
ASML NETHERLANDS B.V.
Andrey Alexandrovich NIKIPELOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIATION SOURCE
Publication number
20170237225
Publication date
Aug 17, 2017
ASML NETHERLANDS B.V.
Andrey Alexandrovich NIKIPELOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON INJECTOR AND FREE ELECTRON LASER
Publication number
20160301180
Publication date
Oct 13, 2016
ASML NETHERLANDS B.V.
Andrey Alexandrovich NIKIPELOV
H01 - BASIC ELECTRIC ELEMENTS